Spektrophotometrische Messungen
o of transmission, absolute reflection and absorption with: UV-VIS 2 beam spectrometer Varian Cary 5E: 200 nm – 3200 nm | Vacuum FTIR Spectrometer Bruker Vertex 70V: 8000 cm-1 – 8 cm-1, max. Resolution 0.16 cm -1
o Determination of the optical constants n(λ), k(λ) from T(λ), R(λ)
o Sample geometry 10 mm x 10 mm – 30 mm x 30 mm (larger measurements possible for measurements in the edge area)
o A cuvette holder is available for liquid samples
o ATR (diamond), λ < 19 μm = TM > 525 cm-1
Varian Cary 5E
Bruker Vertex 70v
Sentech SE850
Ellipsometric measurements:
o Wavelength range 0.28 μm – 2.4 μm
o Multi-angle measurements in 5 ° increments from 40° – 90°
o Determination of optical constants n(λ), k(λ) from Δ(λ), Ψ(λ)
o Thickness determination of transparent layers of single nanometers