Measurement Technology: Electrical

Measurement of electrical properties:

o U/I characteristic measurement in the range 1 μV – 100 V, 1 pA – 100 mA by means of 4-tips for the determination of area and specific contact resistance also on microstructured contacts in linear and van der Pauw geometry

o CV measurements ranging from fF to nF

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4 freely movable contacts for measuring any structure

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EP6 by Süss MicroTec