Measurement of electrical properties:
o U/I characteristic measurement in the range 1 μV – 100 V, 1 pA – 100 mA by means of 4-tips for the determination of area and specific contact resistance also on microstructured contacts in linear and van der Pauw geometry
o CV measurements ranging from fF to nF
4 freely movable contacts for measuring any structure
EP6 by Süss MicroTec