SEM

Our laboratory is equipped with a SH 5000 from Hirox.
This SEM analyzer combined with a Bruker Flash 630 M EDX system provides excellent elemental analysis. The extensive range of accessories allows us to perform a spatially resolved qualitative analysis and identification of known and unknown materials. With the detector for secondary electrons, depth-sharp topographic statements are obtained. The backscattered electron detector can be used to display material contrasts. An integrable cooling/heating stage and low-vacuum mode allow the analysis of organic materials.

Technische Daten

o Acceleration voltages: 5, 10, 15, 20, 30 kV
o Electron source: tungsten cathode
o Detectors: SE, BSE, EDX
o Magnification: 30 – 100,000 times
o Max. resolution: 5 nm (30 kV, SE)
o Working distance: 8 – 20 mm
o Max. sample size: 80 mm Ø, H = 35 mm
o EDX detector: Bruker Flash 630 M
o Resolution: <133 eV (MnKα)
o Mapping: 4000 x 4000 pixels
o Cooling/heating: -25°C – 50°C at 300 Pa

Software

o Quantax Esprit 2.0

Hirox SH 5000