Specifications
o System DTF – FLA100
o Irradiation area 100 mm (4″)
o Energy densities (0.1 – 22) J/cm²
o Pulse length: (0.4 – 3) ms
o Xe Flashlamps Spectrum: UV-VIS-NIR
DTF FLA100
Vacuum chamber and lamp housing of FLA100
Applications
o Realization of flat doping profiles
o Tempering process for temperature-sensitive components and substrates