In our thin-film laboratory we offer the following services
- Manufacturing of microelectronic contact layer systems (also transparent) and optical and passivation layers by (reactive) magnetron sputtering of thin metal and doped metal oxide layers (<1 μm). (3 targets tiltable over coating position, RF and DC excitation, in situ cleaning by means of diode plasma discharge possible before coating)
- Manufacturing of optical and passivation layers using PECVD