Measurement of total energy input:
o Calorimetry to Gardon
o Backside radiation measurement of the heating of the sensor surface
o External calibration of the absolute energy input Etot with energy (radiation) source or internal calibration of the absolute energy input by means of the process plasma
o Energy flow range: about 5 mW/cm2 to 800 mW/cm2
o Potential at the front electrode in the range -100 V to +50 V freely selectable (adjustable ion or electron current)
Measurement of mass occupancy:
o by changing the frequency of a quartz oscillator
o Determination of deposition rate R and current layer thickness d
o Suitable for layer deposition and layer etching
o Use of standard commercial oscillating crystals (ø 14 mm, f0 = 6 MHz)
Measurement with planar Langmuir probe:
o Measurement of the current-voltage characteristic at the front electrode of the quartz oscillator (voltage range -100 V to +50 V, maximum current 100 mA)
o Determination of the plasma parameters Floating-Ufloatand plasma potential UPlasma, electron temperature Te and electron ne and ion density ni using LabView based evaluation
o The combination with the rate R allows the determination of the energy input per layer-forming particle PaJneutral and the ion to neutral particle ratio jion/jneutral
o Current measurement at fixed potential