Measurements of surface profiles with BRUKER Dektak XT

Surface profile determination and coating thickness measurements with stylus profilometer by step height measurement 10 nm ≤ 1 mm

o Max. lat. travel distance 55 mm (with stitching 200 mm)
o Stylus force equivalent 0.03 mg – 15 mg
o 3D surface profile
o Roughness Analysis
o Deflection Measurement, 2D Stress Analysis